The Physics of Micro/Nano-Fabrication
Ivor Brodie
642 pages, Hardcover
ISBN: 0306441462
ISBN13:
Language: English
Publish: 728467200000
In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.